Description:
Cambridge NanoTech Inc. aims to make Atomic Layer Deposition ( ALD ) accessible to all researchers and developers worldwide. We manufacture compact ALD tools, providing pinhole-free thin films for: Nanotubes, Nanowires, ORGANIC SEMICONDUCTORS, III-V Semiconductors (gate dielectrics); MEMS, NEMS, Photonic Crystals, Porous Media, Filters, Membranes (3D conformal coatings); OLED, Organic Displays, Solar Cells (passivation and AR coatings); Silicon Microelectronics, DRAM (high-k dielectrics, capacitors); Integrated Optics, Lasers, Photonics (optical coatings). Atomic Layer Deposition replaces sputtering, evaporation, spin coating, mocvd, mombe, omvpe, cvd, pecvd, lpcvd, apcvd, laser ablation, electrodeposition, electroless, spin on glass and TEOS. |
